The table below shows a summary comparison of Secondary Ion Mass Spectrometry (SIMS) and other techniques for the chemical characterization of surfaces.
XPS
AES
SIMS
EDX
Vacuum
Required
Yes
Yes
Yes
Yes
Incident
Particle/Radiation
photon
electron
ion
electron
Emitted
Particle/Radiation
electron
electron
ion
photon
Analysis
of Emission
energy
energy
mass
energy
1
Surface
Information
Yes
Yes
Yes
No
Elemental
Information
Yes
Yes
Yes
Yes
Molecular
Information
Yes
(Yes)
2
Yes
No
Spatial
Information
(Yes)
3
Yes
Yes
Yes
Depth
Information
Yes
Yes 4
Yes
No
Quantitative
Information
Yes
Yes
(Yes)
5
Yes
1 or
wavelength for WDX
2 limited
information can be deduced
3 typically
requires long analysis times
4 requires
auxiliary ion beam etching
5 with
the use of matched standards
AES - Auger Electron
Spectroscopy
EDX - Energy Dispersive X-ray analysis
SEM - Scanning Electron Microscopy
SIMS – Secondary Ion
Mass Spectrometry
XPS - X-ray Photoelectron Spectroscopy
A SIMS analysis utilises a phenomenon known as sputtering, where a high-energy “Primary” ion dislodges “Secondary” ions from the extreme atomic layers of a surface.
Computer simulations of this sputtering process have been performed, for example by Professor Barbara J. Garrison at The Pennsylvania State University in USA http://galilei.chem.psu.edu/Welcome.html
and by Dr Postawa Zbigniew at the Jagiellonian University in Poland http://users.uj.edu.pl/~ufpostaw
An extract from an example kindly made available by Dr Postawa Zbigniew is shown below. Full videos can be viewed on the websites given above.
The video opposite shows the Primary Ion dislodging Secondary Ions from the Surface Atomic Layers
The Secondary Ions generated are then analysed by Mass Spectrometry – hence the name Secondary Ion Mass Spectrometry.
For further details about SIMS, please view the following introductory documents.
SIMS Introduction (194kb)
A general introduction to the SIMS analytical technique, written with reference to the capabilities of the MiniSIMS alpha.
SIMS Instrumentation (153kb)
A general introduction to the instrumentation required for a SIMS analysis, using the MiniSIMS alpha configuration as an example.
SIMS Samples (74kb)
A general introduction to the types of samples that can and cannot be analysed by SIMS, written from the viewpoint of a MiniSIMS user
Please note you will require Adobe® Reader® to view these files.
Links to other sites
www.simsworkshop.org SIMS Workshop is an international resource for SIMS users, containing a user and equipment supplier directory, discussion forums, internet resources page, recent SIMS literature and topical articles.
www.uksaf.org UK Surface Analysis Forum (UKSAF) contains extensive information about all forms of surface analysis including detailed information on many different analytical techniques, online tutorials, reference data, conference information, news and links to other resources.
www.chem.qmw.ac.uk/surfaces/scc Dr Roger Nix at Queen Mary, University of London, UK has prepared a series of tutorials forming An Introduction to Surface Chemistry.
www.avs.org/education.catalog.aspx The American Vacuum Society runs regular short courses on the topics relating to vacuum technology, surface analysis, and coating processes.
www.lpdlabservices.co.uk
LG Philips Displays Laboratory Services, based in the UK, offers industrial, commercial and problem solving expertise. Facilities include surface analysis, XPS, AES, SIMS, SEM EDX, GC, AAS, UV, FTIR, XRF, metrology, mechanical testing and chemical techniques.
www.winnats.co.uk
Winnats Scientific Services has more than 25 years of experience in surface
characterisation, materials testing and the physical sciences, and provides
access to a wide range of industry-respected expertise in surface analysis
and other analytical techniques.
www.spectroscopyeurope.com Spectroscopy Europe is a journal covering all areas of spectroscopy and is circulated free-of-charge to 21,000 readers across Europe. The web site includes a searchable database of products and a diary of meetings and conferences.
www.microscopy-analysis.com Microscopy & Analysis is a journal circulated free of charge to users who specify microscopical, imaging and analytical equipment in Europe, The Americas and Asia/Pacific. Visit their website for more details.
SIMS Introduction